6240B
SMU capable of high-speed response pulse source, 5½-digit measurement and high-precision low-resistance measurement
6241A/6242
High-performance SMU capable of pulse source/measurement with a minimum pulse width of 50 μs
6247C/6247G
SMU capable of testing high-voltage devices by output voltage up to +250 V and output current up to ±320 mA
6253/6254
SMU best for evaluation of high-precision electronic components with 5½-digit source resolution and 6½-digit measurement resolution
6146/6156
Standard power source best used as calibrator and secondary battery simulator
SMU | 6240B | 6241A | 6242 |
Number of digits for generation | 4½ | ||
Output method | Bipolar | ||
Maximum output voltage | ±15 V/1A | ±32 V/0.5 A | ±6 V/5 A |
Minimum voltage resolution | 10 μV | ||
Maximum output current | ±4 A/10 V(DCで±1 A/15 V) | ±0.5 A/32V | ±5 A/6 V |
Minimum current resulution | 1 nA | ||
Number of digits for measurement | 5½ | ||
Accuracy (typical range) | 0.02 % | ||
Minimum measurement voltage resolution | 1 μV | ||
Minimum measurement current resulution | 100 pA | ||
Maximum measurement resistnace / Minimum resolution |
0.75 GΩ/0.25 μΩ | 1.6 GΩ/2 μΩ | 304 MΩ/0.2 μΩ |
Pulse application / Measurement | Available | ||
Minimum pulse width | 50 μs | ||
Interface | USB, GPIB | ||
SMU | 6247C/6247G | 6540 | 6541 |
Number of digits for generation | 4½ | ||
Output method | Bipolar | ||
Maximum output voltage | +250 V, -15 V/320 mA | ±10 V / 500 mA (1 A for 4 channels) | |
Minimum voltage resolution | 100 μV | 100 μV | |
Maximum output current | ±320 mA/+250 V, -15 V | ±500 mA / 10 V (1 A for 4 channels) | |
Minimum current resulution | 100 pA | ||
Number of digits for measurement | 5½ | ||
Accuracy (typical range) | 0.02% | ||
Minimum measurement voltage resolution | 10 μV | ||
Minimum measurement current resulution | 10 pA | ||
Maximum measurement resistnace / Minimum resolution |
125 GΩ/30 μΩ | 5 GΩ/20 μΩ | |
Pulse application / Measurement | Available | ||
Minimum pulse width | 50 μs | ||
Interface | 6247C: USB, RS232 6247G: USB, GPIB |
USB port per channel 4 USB ports in total |
Single USB port GPIB port (option) LAN port (option) |
SMU | 6253 | 6254 | |
Number of digits for generation | 5½ | ||
Output method | Bipolar | ||
Maximum output voltage |
±110 V/0.5 A ±64 V/1 A |
±20 V/7 A ±7 V/20 A |
|
Minimum voltage resolution | 5 μV | ||
Maximum output current | ±2 A/32 V | ±20 A/7 V | |
Minimum current resulution |
50 pA |
5 nA | |
Number of digits for measurement | 6½桁 | ||
Accuracy (typical range) | 0.02 % | ||
Minimum measurement voltage resolution | 100 nV | ||
Minimum measurement current resulution | 1 pA | 100 pA | |
Maximum measurement resistnace / Minimum resolution |
550 GΩ/0.05 μΩ | ||
Pulse application / Measurement | Available | ||
Minimum pulse width | 25 μs | ||
Interface | USB, GPIB, LAN (option), RS232 (option) |
Working Standard | 6166 | 6146 | 6156 |
Number of digits for generation | 6½ | 4½ | 5½ |
Maximum output voltage | ±1200 V / ±12 mA | ±32 V / ±220 mA | |
Minimum voltage resolution | 10 nV | 1 μV | 100 nV |
Maximum output current | ±1200 V/12 mA | ±32 V/220 mA | |
Minimum current resulution | 1 nA | 100 nA | 10 nA |
Voltage source accuracy (typical value) | 0.0035 % | 0.025 % | 0.015% |
Current source accuracy (typical value) | 0.0055 % | 0.03 % | 0.02 % |
Thermal EMF output function |
-220 ℃ to +1820 ℃ (resolution: 0.1 ℃) |
ー |
-220 ℃ to +1820 ℃ (resolution: 0.1 ℃) |
Settling time | 1 s以下 | 10 ms | |
Output noise (typical range) | 3 mVp-p | ||
Interface | GPIB, USB, BCD (factory option) |